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Hirox Debuts Mini-SEM

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Hirox Debuts Mini-SEM

Written by Mike Buetow
Friday, 02 May 2008
Mini-SEM is capable of 15 nm inspection with 20,000-30,000X magnification. Generates images between 2 and 10 frames/sec., depending on size. X,Y,R viewing is 20mm/20mm/360°. Sizes: 490 x 520 x 540 mm, or 400 x 160 x 340 mm. Runs on Windows XP. $40,000. Hirox, www.hirox.com.cn

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