Anritsu 3-D laser inline inspection system features horizontal resolution of 10 µm/20 µm interchangeable, and vertical resolution of 1 µm, high-speed inspection (33 sq. cm./sec. at 20 µm resolution; 13.8 sq. cm./sec. at 10 µm resolution). Program generation is said to be accomplished in approximately 5 min. and consistent results are provided. Offers automatic calibration function, SPC software, and zero plane reference points.
 
Seika Machinery Inc., www.seikausa.com