AXP shadow moiré system now comes with optional Convection Reflow Emulation Module (CRE6) that allows mirroring of the thermal environment of a reflow oven while conducting warpage metrology. Features increased heating/cooling rates and improved temperature uniformity. Measures warpage on substrates up to 70mm (diameter) with sub-micron z-resolution in a convection reflow environment. Heating rates of up to 5⁰C/sec. allow measurements from 25⁰ to 275⁰C with convective heating and tightly controlled thermal uniformity.

Akrometrix, akrometrix.com