SAN JOSE -- SEMI today announced the release of eight standards, including specifications for epitaxial silicon wafers, test methods for measuring mechanical vibrations in FPD handling equipment, MEMS terminologies, and data matrix symbology for automated identification of EUV lithography masks.

SEMI releases specs three times per year. The Nov. 1 batch of eight new technical standards are applicable to the semiconductor, flat panel display and MEMS manufacturing industries.

They are available in CD-ROM format or can be downloaded from the SEMI Web site. View the complete list at: http://downloads.semi.org/pubs/wstdsbal.nsf/NewPubsList.