Nikon Metrology Debuts XT V 160 NF X-ray
Published: 19 May 2014
XT V 160 NF flat-panel-based x-ray inspection system facilitates real-time imaging and defect analysis of wafer-level, semiconductor device and PCBA applications. Comes with x-ray NanoFocus source and high-precision manipulator. Has 3MP flat-panel detector; provides feature recognition capability below 0.1µm. Features 360° continuous rotate detector axis; enables oblique angle views of up to 60° to the center of the detector panel. Offers intelligent region of interest lock. Tray is 580mm x 580mm.
Nikon Metrology, www.nikonmetrology.com
