Apreo scanning electron microscope has a proprietary compound final lens design said to be capable of resolution down to 1.0nm at 1kV without the need for beam deceleration. Provides performance on nearly any sample, even if tilted or topographic. 

Offers backscatter detection at low beam currents, at any tilt angle, on sensitive samples and at TV-rate imaging, for strong contrast of materials. Detector segments can be individually addressed to optimize for angular contrast or for signal intensity and extract information that matters most. Low-vacuum capability with a chamber pressure of up to 500 Pa. Has ports for up to three energy dispersive x-ray spectrometry (EDS) detectors, coplanar EDS and electron backscatter diffraction (EBSD), analytics-compatible low-vacuum, and beam currents up to 400nA. Software provides user guidance and “point-and-click” navigation using an in-chamber camera. Load multiple samples quickly and easily without tools. 

FEI, fei.com/apreo

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