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SAN JOSE - Worldwide semiconductor manufacturing equipment billings reached $9.4 billion in the first quarter, according to the industry trade group SEMI, up 2.3% from a year ago and 6.5% sequentially. Bookings ($7.25 billion) were down 21% from a year ago and 12% from the fourth quarter.

The data, collected in concert with the Semiconductor Equipment Association of Japan, come from more than 150 equipment companies.

"The first quarter billings showed some positive momentum over the fourth quarter of last year, while worldwide bookings for semiconductor manufacturing equipment are down for the same period," said Stanley T. Myers, president and CEO of SEMI.

Billings in Korea were up significantly sequentially, Myers said.

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