9300 Series equipment platforms offers omnidirectional, ultra-low-frequency vibration damping and automatic leveling while raising equipment only inches off the floor. Proprietary airmount system provides vertical isolation, while tri-filar pendulum assembly provides stable cradle support for horizontal isolation. The pendulum assembly eliminates the need for the resonance-generating corner lift brackets.

Platform stiffness is comparable to that of a 3" plate of solid steel at approximately one-third the weight and with more efficient damping — vibration isolation efficiencies at maximum load (up to 25,000 lbs.) can be as high as 98% for vertical natural frequency and 96% for horizontal natural frequency. 

Standard platform is a rigid, lightweight, epoxy-laminated "sandwich" — a 2" composite layer between 1/2" top and bottom plates of corrosion-resistant steel.

Standard finish is black polyurethane, but can be finished with stainless steel or white epoxy powder coat.  Available in custom sizes or shapes, with extra leg supports, and with cutouts or notches. Nonmagnetic platforms are also available.

Applications include vibration isolation for SEMs, TEMs, CMMs, steppers and mask aligners.

Kinetic System, Inc., www.kineticsystems.com

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