ScorpION2 is a high performance ionization bar designed for demanding application requirements in the semiconductor industry. Meets the needs of Equipment Front End Modules (EFEM) for 200 and 300 mm wafer process tools while integrating ionizer functionality through the tool’s existing user interface.
 
Each bar controls, stores, maintains and communicates operating parameters independently using a closed-loop control scheme. Each bar compares the desired operating values to the actual values stored in its non-volatile memory and controls the system to maintain desired performance.
 
‘Peak Reduction’ technology allows users to select a percentage of overlap during bi-polar pulse cycles, effectively eliminating off time between bi-polar cycles delivering faster discharge times at reduced levels of offset voltage.
 
Can be controlled via a hand-held MMI (man machine interface) in two-way IR or wired operating mode. The MMI has a multi-line display and membrane switch pad. Optional communication and control using a PC interface capability for monitoring, setup and diagnostics. Each interface provides real time operating values to provide simplified calibration and setup.
 
Available with CVD Silicon Carbide emitters. Operates on 24 VDC input. Provides RS-485 communications. Communications and power are distributed via 6-conductor RJ-11 connector and may be daisy chain wired in series. Dimensions are 75 x 48 mm; available in a number of lengths including 45.7; 61.0; 91.4; 111.8 and 162.6 cm. 
 
Simco, an Illinois Tool works company, simcoION.biz
 
 
 

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