Promation has developed a line of 200 and 300 mm wafer handling systems for loading and unloading the line.
 

EWL-700 (loader) and EWU-700 (unloader) are single cassette handling systems that are 10K clean room compliant. Wafers may be safely transported from and into Fluoroware or other type magazine cassettes within a small footprint. 
 
Promation, pro-mation-inc.com