Model 325 Electrostatic Voltmeter, an ultra-sensitive instrument which is ideal for noncontacting electrostatic voltage measurement and monitoring in applications within high-tech, semiconductor, materials processing, materials science and R&D sectors.
Designed for applications that require highly accurate, low noise, noncontacting measurement of electrostatic voltages from millivolts to +/- 40 V over a range of probe-to-surface distances.
Applications include electrostatic monitoring of devices sensitive to ESD, and testing of the reliability and characteristics of dielectric materials and films in electronic applications.
In semiconductors, is designed to measure the surface potential of bare or processed wafers to analyze doping and thin film characteristics. Also useful for measurements of polarization, residual charge and characterization of electrostatic chucks.
Can monitor electrostatic charge where the build-up of such charge can cause productivity or yield problems, as in high-end processing of paper, plastic, textile or other film products.
In materials science and R&D, applications include contact potential (surface work function) determination, materials evaluation and electret studies.
Features include sensitivity of 1 mV, speed of response less than 3 ms and accuracy better than 0.05% of full scale. Low impedance probe sensor assures measurement accuracy which is essentially independent of probe-to-test-surface spacing while eliminating the external environmental effects of high humidity and contamination on measurement accuracy. Contaminants include airborne dust, ions, chemicals and other particulates.
Offers a higher performance alternative to Model 320C Electrostatic Voltmeter with faster speed of response, lower noise and higher accuracy. Smaller probe also increases the unit’s utility in space-constrained environments. Designed to address demanding semiconductor parameters for permittivity, oxide thickness and integrity, contact potentials and higher-speed automated voltage profile scanning.
Special features allow tuning the performance of the unit to compensate for specific test conditions. Can be operated as a bench top unit or in a standard rack (with optional hardware).
TREK, Inc., trekinc.com