JPSA Debuts Large-Format Beam Switching Module
Published: 13 December 2005
by Staff
JPSA’s large-format laser beam switching module can quickly, accurately switch the entire beam from one path to another (i.e., between two different experiments, or between two separate processes). Has 50 x 50 mm clear aperture for passage of a larger-diameter homogenized beam without beam corner clipping. A vacuum UV (VUV) product, can be used with short-wavelength UV excimer beams including 157, 193 and 248 nm. There is no grease or oil VUV beam delivery designs, and all organic materials have been removed to prevent degradation by UV radiation and contamination of the optics and interior chamber. This switching module can be purged with high-purity gases such as nitrogen.
The industrial-grade product is designed for 24/7 service. Designed for integration into a laser beam delivery system and can deflect the beam out of production when desired to perform beam diagnostics, check beam homogeneity, pulse width or other beam characteristics, since an excimer laser beam changes characteristics over time and usage.
Remote control allows the user to insert or remove a beam splitter; is magnetically pre-mounted so the beam splitter will be accurately located. It has a true gimbal design and allows either a 90-degree turn or straight-through beam path. Switching is mechanical and the unit holds accurate tolerance swing when switching from one path to the next.
JPSA Laser, jpsalaser.com
